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主要參數(shù)

型號(hào)

CM112

CM242

焦距

110 mm

240 mm

f/#

3.9

7.8

倒線色散

3.2nm/mm (with 1200 g/mm grating)

1.60nm/mm (with 1200 g/mm grating)

分辨率

<0.5nm (additive)

<1nm (subtractive)

<0.04nm (additive)    0.06nm (subtractive)

波長(zhǎng)精度和重復(fù)性

0.1nm (additive)

0.2nm (subtractive)

0.01nm (additive)

0.01nm (subtractive)

波長(zhǎng)準(zhǔn)確

±0.3nm (additive)

± 0.6nm (subtractive)

± 0.30nm standard (with 1200 g/mm grating)

掃描速度

1 to 200nm/s (with 1200g.mm grating)

雜散光

< 10-9

狹縫

Standard Set includes; 0.125mm, 0.15mm,0.30mm, 0.6mm, 1.2mm and 2.4mm x 4.0mm.

Unilateral, computer controlled, curved entrance and straight exit standard.

Width - 10μm to 3000μm

Height - 2mm to 20mm

光柵

2或4塊(30 x 30mm)

2-6塊光柵(68 x 68mm standard, 68 x 84mm optional)

控制接口

RS232 standard